service@chemindustry.com
Sign in    |    Register    |    

Dichlorosilane

CAS No.: 4109-96-0      Formula: Cl2H2Si

Weight: 101.01

Synonyms: dichlorosilane for high purity,electronic grade; dichlorosilane Cl2H2Si; dichloro-silan; dichlorsilane; siliconchloridehydride; DICHLOROSILANE;


Search products supplier Encyclopedia

Description

colorless. Flammable. Toxic corrosive gas with pungent odor. Melting point -122°C. Boiling point 8.2 ℃. Gas relative density (air = 1) 4.599; liquid relative density d4}-122>. 1.42. Critical temperature 176.3 ℃. Vapor pressure (Chemicalbook 20°C, absolute pressure) 0.15Mpa. Specific volume (20°C, 1.0133×105Pa) 239mI/g. The explosion limit in air is 1.3% to 98%. Reacts violently with water. Hydrolyzed in humid air to generate hydrochloric acid mist. There is strong corrosiveness. Used in semiconductor manufacturing, especially epitaxy processes as a silicon source. For polysilicon epitaxial growth and chemical vapor deposition of silicon dioxide and silicon nitride in the electronics industry

Basic Information
CAS No.:
4109-96-0
Synonyms:
dichlorosilane for high purity,electronic grade; dichlorosilane Cl2H2Si; dichloro-silan; dichlorsilane; siliconchloridehydride; DICHLOROSILANE;
Formula:
Cl2H2Si
Molecular Weight:
101.01
PSA:
LogP:
Properties
Appearance & Character:
colorless gas
Density:
1,22 g/cm³
Melting Point:
−122 °C(lit.)
Boiling Point:
8.3 °C(lit.)
Flash Point:
-37°C
Storage Conditions:
Safety Info
WGK Germany:
1
Hazard Category Code:
12-14-23-34
Security Instructions:
26-36/37/39-45
Dangerous Goods Sign:
F+,T